UV (Ultraviolet) Curing Device | High Pressure Mercury Lamp Specification "UVC-512"
It is possible to perform uniform UV irradiation over the entire area of the wafer by rotating the work while irradiating.
The 【Model UVC-512】 is a device capable of emitting ultraviolet light at a specific wavelength (365nm). By irradiating UV (ultraviolet) curing type films, it allows for easy separation of chips from the tape after dicing. This device rotates the workpiece during irradiation, making it compact and lightweight, as the length of the light source fits within the radius of the workpiece, while also enabling uniform irradiation across the entire area of the workpiece. It is a UV film curing device / UV irradiation device.
basic information
Equipped with a unique high-efficiency, low-flow N2 purge function, the amount of N2 used is significantly less compared to conventional devices, while still achieving a reliable replacement effect. High-pressure mercury lamp specification. Compatible with 300mm/12”. Dimensions: 650(W) × 800(D) × 980(H).
Price range
Delivery Time
Model number/Brand name
UVC-512
Applications/Examples of results
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