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Film Attachment Device | Vacuum Mounter TV-200T

TAIKO(R) wafer and thin wafer compatible models

The "TV-200T" is a vacuum mount designed to accommodate wafers with step or special shapes on the outer edge, such as TAIKO(R) wafers and thin wafers. By adopting a bonding method using a top membrane, it achieves "radial bonding," which uniformly applies tape from the center of the wafer outward. This helps to suppress stress concentration and uneven bonding on the outer edge specific to TAIKO(R) wafers, providing stable mounting quality. 【Compatible Wafer Size】 TV-200T: 200mm (8 inches) *TAIKO(R) is a registered trademark of Disco Corporation in Japan and other countries.

Official page of the vacuum mounter "TV-200T"

basic information

■Main Features Membrane Attachment Method By transmitting pressure through a flexible membrane, it uniformly conforms to wafers with steps and curved surfaces. Radial Attachment By progressing the attachment from the center to the outer circumference, it reduces bubble inclusion and localized stress. Low Damage Design for Wafers It minimizes mechanical stress on the outer edge, reducing the risk of cracking or chipping for thin wafers and TAIKO(R) wafers. High Reproducibility with Vacuum Attachment By numerically managing vacuum pressure and process time, stable process reproducibility is ensured. ■Main Specifications Frame Size: DTF2-8-1 Device Dimensions: 360mm(W) × 600mm(D) × 815mm(H) Weight: 29kg Required Vacuum Level (Absolute Pressure): 0.2 kPa Recommended Exhaust Rate: Approximately 320 L/min (19 m³/h) Required Air Pressure: 0.4 to 0.6 MPa Input Power Supply: AC100V 50/60Hz

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Model number/Brand name

TV-200T

Applications/Examples of results

[For TAIKO(R) + Vacuum Attachment] Compatible with TAIKO(R) wafers and thin wafers that have steps or special shapes on the outer peripheral area.

Line up(4)

Model number overview
TV-150 / TV-200 / TV-300 Standard model
TV-200H / TH-300H Heating model
TV-200T TAIKO(R) wafer-compatible model
TV-200TH TAIKO(R) Wafer and Heating Compatible Model

Wafer/Film Attachment Device | Wafer Mounter

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Techno Vision Co., Ltd. has been engaged in the development, manufacturing, and import/export of its own products, focusing on cleaning technology and assembly technology since its establishment in September 1987. In today's high-tech industry, we are committed to responding to our customers' needs and providing technology, products, and services from the perspective of our customers.