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Coating for Cleaning Processes in Semiconductor Manufacturing Equipment

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Corrosion prevention, prevention of metal ion leaching, and prevention of wafer scratches. Summarizing and solving the challenges of cleaning equipment.

In the cleaning process of semiconductor manufacturing, the use of various chemical solutions poses serious challenges such as corrosion of equipment parts and the leaching of metal ions. By applying fluororesin coating to moving parts, chemical resistance is provided, preventing corrosion. The application in cleaning tanks helps suppress the leaching of metal ions, maintaining a high-purity cleaning process. Furthermore, the application to the wafer stage can also address the prevention of wafer scratches. Yoshida SKT, as a pioneer in Teflon(TM) coating, has extensive experience in the semiconductor field and excels in customizing solutions according to customer equipment specifications and chemical conditions. For detailed technical information and case studies, please download the materials for review.

Related Link - https://www.y-skt.co.jp/products-husso.html

basic information

【Main Features】 - Chemical Resistance: High chemical stability against various chemical solutions to suppress corrosion of components - High Purity Compatibility: Extremely low levels of metal ion leaching - Low Friction: Reduces friction on the wafer contact surface to prevent scratches 【Applicable Areas】 - Drive components, cleaning tanks, wafer stages, etc. 【Grades】 - Optimal grades can be selected according to the type of chemical solution and temperature conditions.

Price range

Delivery Time

Model number/Brand name

Teflon(TM) coating

Applications/Examples of results

【Examples of Adoption Results】 - Drive components of cleaning equipment: Corrosion prevention in a chemical environment - Cleaning tank: Maintenance of high-purity processes by reducing metal ion leaching - Wafer stage: Corrosion prevention and prevention of wafer scratching For more details, please download the materials or contact us.

catalog（2）

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The Role and Importance of Fluororesin Coating in Semiconductor Manufacturing | Yoshida SKT Co., Ltd.

TECHNICAL

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Guidebook on Teflon(TM) Fluororesin Coating "Teflon(TM) Fluororesin Processing" "Product Catalog"

PRODUCT

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To maximize the performance of manufacturing equipment and machine parts, Yoshida SKT derives the "optimal solution" tailored to our customers from hundreds of surface treatment technologies. - Decreased productivity due to adhesive troubles - Instability in product quality due to friction - Early deterioration of equipment due to corrosion We respond to these challenges in the manufacturing field with our extensive track record and reliable technical expertise. In 1963, we began fluoropolymer processing. In 1968, we signed a licensing agreement with DuPont (now Chemours), supporting manufacturing innovations for over 2,000 customers across various industries, from automotive to medical and aerospace. Furthermore, in 2024, we are focusing on the development of next-generation products, such as PFAS-free coatings, contributing to the advancement of sustainable manufacturing. With a three-base system in Nagoya, Tokyo, and Yamaguchi, we flexibly respond to both mass production and custom orders. Our consistent quality management system ensures that we deliver reliable quality. For solving challenges in the manufacturing field, trust the surface treatment experts at Yoshida SKT.

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