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Coating for inspection processes of semiconductor manufacturing equipment

PR情報エリア

Prevent damage, adhesion, and metal powder generation on wafers, and maintain a clean environment in the inspection process.

In the semiconductor manufacturing inspection process, issues such as wafer scratching, adhesion to the chuck stage, and the generation of metal powder from sliding components arise. Fluororesin coating, when applied to the chuck stage, serves as a physical protective film for the wafer, preventing scratches, and its non-stick properties prevent adhesion of the wafer, contributing to an efficient inspection process. Additionally, applying it to sliding components reduces the generation of metal powder, maintaining a clean inspection environment. Yoshida SKT is a customization specialist that offers optimal proposals from hundreds of surface treatment technologies. For more details, please download the materials or contact us.

Related Link - https://www.y-skt.co.jp/products-husso.html

basic information

【Main Features】 - Slip Resistance: Functions as a protective film to prevent scratches on the wafer surface - Non-Stick Property: Prevents the adhesion of wafers and improves inspection efficiency - Sliding Characteristics: Reduces the generation of metal powder and maintains a clean environment 【Applicable Parts】 - Adsorption stage, sliding components, etc. 【Grades】 - Optimal grades can be selected according to inspection conditions

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Delivery Time

Model number/Brand name

Teflon(TM) coating

Applications/Examples of results

【Purpose】 - Adsorption stage: Prevention of wafer damage and sticking - Sliding parts: Maintenance of a clean environment by preventing the generation of metal powder For more details, please download the materials or contact us.

catalog（2）

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The Role and Importance of Fluororesin Coating in Semiconductor Manufacturing | Yoshida SKT Co., Ltd.

TECHNICAL

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Guidebook on Teflon(TM) Fluororesin Coating "Teflon(TM) Fluororesin Processing" "Product Catalog"

PRODUCT

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To maximize the performance of manufacturing equipment and machine parts, Yoshida SKT derives the "optimal solution" tailored to our customers from hundreds of surface treatment technologies. - Decreased productivity due to adhesive troubles - Instability in product quality due to friction - Early deterioration of equipment due to corrosion We respond to these challenges in the manufacturing field with our extensive track record and reliable technical expertise. In 1963, we began fluoropolymer processing. In 1968, we signed a licensing agreement with DuPont (now Chemours), supporting manufacturing innovations for over 2,000 customers across various industries, from automotive to medical and aerospace. Furthermore, in 2024, we are focusing on the development of next-generation products, such as PFAS-free coatings, contributing to the advancement of sustainable manufacturing. With a three-base system in Nagoya, Tokyo, and Yamaguchi, we flexibly respond to both mass production and custom orders. Our consistent quality management system ensures that we deliver reliable quality. For solving challenges in the manufacturing field, trust the surface treatment experts at Yoshida SKT.

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