Mass Flow Controller/ Meter "SLAMf Series"
Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.
Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.
basic information
【Other Features】 ■ Achieves high process accuracy and control even under harsh conditions due to the highly durable device housing. ■ Improves the S/N ratio at low set points with unique thermal sensor technology. ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration. ■ Up to six calibration programs can be accommodated with a single device. ■ Equipped with an easily accessible service port to simplify installation, troubleshooting, and diagnostic tasks. ■ High precision is achieved through high-performance measurement systems and calibration based on global standards. ■ Streamlines integration into existing systems with several types of protocol communication interfaces. *For more details, please refer to the related link page or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
Model SLAMf50/SLAMf51/SLAMf53/SLAMf60/SLAMf61/SLAMf63/SLAMf64
Applications/Examples of results
【Applications】 ■ Pilot plants for petrochemicals and chemical gases ■ Life science bioreactors ■ Blanketing in food processing *For more details, please refer to the related links page or feel free to contact us.
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Solutions from Brooks Instrument that support a sustainable future.
Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.
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[Panel Material] Contributing to Scale-Up and Automation
■ Wide flow range/pressure conditions and support for digital I/O ■ Certificates and certifications ■ Applications Please take a look here. https://www.ipros.jp/catalog/detail/752600 You can also view it from related catalogs.
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<Application Information> Accurate and stable supply of gas and liquid for titanium nitride coating.
Titanium is frequently used in such applications to form a very hard titanium nitride (TiN) coating on the target products. Titanium coatings are often used for decorative purposes on jewelry, household appliances, and automotive trim due to their golden appearance. Similar coatings may also be used on the surfaces of medical devices and instruments as non-toxic options. This type of coating is now being applied in advanced biomedical devices, including in vivo biosensors. The coating of titanium nitride generally employs the CVD process. In this process, multiple chemicals (TiCl4, N2, H2) are supplied to a furnace and reacted at high temperatures to produce titanium nitride, which is then deposited on the surface as a coating. It is crucial for the integrity, appropriate thickness, and uniformity of the coating to accurately deliver these materials to the furnace.
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Product Information: Elastomer Seal Thermal Mass Flow Controller/ Meter "SLAMf Series"
Model SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64 "Durability to withstand harsh environments! Achieving excellent precision with precise mass flow control" Whether indoors or outdoors, in environments with dust or places that handle water, the 'SLAMf series' elastomer seal thermal mass flow controllers/meters provide proven high precision and long-term stability unique to the "SLA5800 family." Applications ■ Pilot plants for petrochemical and chemical gases ■ Life science bioreactors ■ Blanketing in food processing
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Would you like to turn existing equipment into small IoT devices? What can be done? What is needed?
Many people may have questions like, "What can be done with IoT?" and "What is needed?" upon hearing the term IoT. Through digital communication, it is possible to obtain various information such as flow sensors, valves, circuit boards, and abnormal monitoring that were not accessible with traditional analog control. For example, by monitoring the valve opening, one can detect blockages in the equipment and identify leaks from cumulative flow. This information directly contributes to reducing downtime and improving quality through continuous long-term monitoring and knowledge-based management. Compatible models include those with digital communication via RS485, in addition to traditional analog controls like 0-5VDC and 4-20mA. (Older models such as the 58xxS, MfxxS series, SLA58xxS, and SLAMfxxS series). Even older models that do not support digital communication can be upgraded to the latest mass flow models, enabling digital communication. The dimensions between new and old models are the same, and no wiring changes are necessary. Additionally, we can provide control boxes for data collection from mass flow. This enables a "visualization" of small IoT without making large changes to the equipment.
