High Purity Gas Series Compact Diaphragm Valve 'KCD Series'
Achieving further compactness based on the "KD series"! The basic performance inherits all the high specifications of the "KD series."
The "KCD Series" is a direct diaphragm valve that aims for further compactness based on the "KD Series." Without compromising durability, it achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves. With the highest level of manufacturing environment and internal polishing treatment, it accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Successfully reduced the volume from 1.2 cm³ in the KD Series to 0.97 cm³ ■ Limited to 1/4" size while maintaining the same design as the KD Series, reducing the external size by approximately 20% and also lightweight ■ Achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves without compromising durability ■ Accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Product Materials】 ■Body: SUS316L, SUS316LE (double melted material) ■Seat: PCTFE, PFA, PI ■Diaphragm: Cobalt alloy *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
