High Purity Gas Pressure Regulator "TORR-350 Series"
A high-flow model for low pressure on the primary side! A pressure regulator that can be called the "symbol of pressure regulators for semiconductor gases."
The "TORR-350 Series" is a pressure regulator designed for high flow rates in low-pressure primary applications, suitable for use in large flow supply systems for liquefied gases and large-diameter piping. Production of electropolished specifications is also possible. We conduct shipping inspections, including He leak tests, on all units. Assembly is performed in a clean room with a class 1000 rating at 0.3μm for all units, and since there is no built-in filter, please install a filter in the piping. 【Features】 ■ High flow rate model for low-pressure primary side ■ Assembly is performed in a clean room with a class 1000 rating at 0.3μm for all units ■ Shipping inspections, including He leak tests, are conducted on all units ■ Production of electropolished specifications is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) ■ Usable in large flow supply systems for liquefied gases and large-diameter piping *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications】 ■ Maximum operating pressure at inlet: 1.5MPa ■ Maximum operating pressure at outlet: 0.6MPa ■ Maximum flow rate: 230m3/h (nor) (P1=1.5MPa, P2=0.6MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 10kg ■ Inlet and outlet port diameter: 1/2" ■ External leakage rate ・Less than 1.3×10^-6Pa·m3/sec (threaded connection) ・Less than 1.3×10^-7Pa·m3/sec (welded connection) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Nissansan TANAKA Co., Ltd. aims to provide total solutions for cutting, welding, and gas control by offering products and services that satisfy customers, centered around original technology. Leveraging years of experience and unique technology, we strive to develop and expand our lineup of various products, including laser cutting machines, plasma cutting machines, gas cutting machines, and more, contributing to the industry by turning yesterday's dreams into today's reality.