Pressure Regulator "TORR-2800/2800SH Series"
A large flow model for liquefied gas and corrosive gas with a built-in filter in the flow path of the first chamber.
The "TORR-2800/2800SH series" is a regulator designed to supply corrosive and liquefied gases at high flow rates. A helium leak test is conducted on all units as part of the shipping inspection. Assembly is performed in a clean room with a class 1000 standard at 0.3μm for all units. A filter is built into the flow path of the primary chamber to reduce internal leak occurrences. 【Features】 ■ A pressure regulator that can be called the "symbol of semiconductor gas pressure regulators" ■ Assembly is performed in a clean room with a class 1000 standard at 0.3μm for all units ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrences ■ A helium leak test is conducted on all units as part of the shipping inspection ■ A regulator designed to supply corrosive and liquefied gases at high flow rates *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Performance】 ■ Maximum operating pressure on the inlet side: 15MPa ■ Maximum operating pressure on the outlet side: 1.0MPa ■ Maximum flow rate: 1,000L/min (nor) (P1=4.5MPa, P2=0.4MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 6.7kg ■ Built-in filter filtration degree: 20μm / 10μm (SH series) ■ Surface roughness of gas contact metal parts: Ra 0.25μm ■ Inlet and outlet port diameter: 1/2" ■ External leakage amount: 1.3×10^-10Pa·m3/sec or less *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Usage】 ■ For liquefied gases and corrosive gases *For more details, please refer to the PDF document or feel free to contact us.
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Nissansan TANAKA Co., Ltd. aims to provide total solutions for cutting, welding, and gas control by offering products and services that satisfy customers, centered around original technology. Leveraging years of experience and unique technology, we strive to develop and expand our lineup of various products, including laser cutting machines, plasma cutting machines, gas cutting machines, and more, contributing to the industry by turning yesterday's dreams into today's reality.