Mass flow controller Type 874X compatible with CANopen.
In addition to the high-speed response performance and high range availability of conventional models, it also supports CANopen!
● MFC compatible with CANOpen ● High response speed (fastest within 0.3 seconds, within 0.5 seconds for some models) ● A wide range of lineup supporting flow rates from 10 [ml/min] to 1500 [l/min] ● Protection rating IP65
basic information
【Features】 ◆ We inquire about the measuring gas, flow rate, and operating pressure in advance, and perform actual gas calibration before shipping from the factory. There is no need to individually input gas coefficients. ◆ Gas control and flow measurement can be performed immediately after installation. ◆ We provide optimal proposals based on a rich lineup tailored to your applications and usage conditions. ◆ CANopen compatible ◆ Protection rating IP65
Price information
Prices vary depending on the quantity, so please feel free to contact us.
Price range
P3
Delivery Time
OTHER
Model number/Brand name
Type874X
Applications/Examples of results
■Gas flow control in the thin film synthesis process ■Ammonia removal device ■Exhaust gas combustion device for semiconductors ■Gas flow control for various analytical instruments
