A mass flow controller that reliably controls the flow of various gases and air!
Burkert's mass flow controllers can easily control small to large flow rates with a single unit! They also support a wide range of differential pressures from low to high (10 kPa to 1.0 MPa)!
Flow control of gases is best achieved with a mass flow controller (MFC)! The German manufacturing industry, which is gaining attention in Industry 4.0, presents a proposal for an "easy-to-use" mass flow controller (MFC) from Bürkert, a long-established fluid control equipment manufacturer in Germany, designed for the IoT era! ● Calibrated according to your usage conditions and shipped, so it can be used immediately after delivery! ● No dedicated power supply is required (starts with DC24V), making it easy to install. ● Capable of controlling flow rates from small to large (for example, up to 2500Nl/min (N2) with a single unit). ● Smooth control even at a low differential pressure of 10kPa thanks to the inline sensor. ● Smooth control even at a high differential pressure of 1.0 MPa (10bar). ● Complete shut-off achieved with resin seals and shut-off functionality. ● Fast response to set points, stabilizing within 0.3 to 0.5 seconds. 【Unique to Bürkert & IoT Generation】 ● Flexible support for communication methods such as OpenCAN, fieldbus, RS485, in addition to analog input and output signals. ● Models with protection rating IP65 are also available. ● Proposals focused on maintainability and space-saving designs are also possible!
basic information
**Features** By equipping our uniquely high-performance flow control valve (proportional solenoid valve), we have successfully developed an IoT generation MFC that covers the functions of several conventional MFCs, pressure reducing valves, and shut-off valves. ● One unit can handle a wide range of flow rates from small to large. (For example, it can cover up to 2500 Nl/min (N2) with a single unit) ● It supports a wide differential pressure range, achieving smooth control from a minimal differential pressure of 10 kPa to a maximum differential pressure of 1.0 MPa. ● Equipped with a shut-off function for reliable closure. ● High-speed stability within 0.3 to 0.5 seconds. ◆ Calibration is performed before shipment from the factory. There is no need to input individual gas coefficients. ◆ Gas control and flow measurement can be performed immediately after installation. ◆ No special power supply unit is required; it can be used with a standard DC 24V. ◆ We provide optimal proposals based on your application and usage conditions from a rich lineup of products. ◆ Various settings for mass flow controllers/mass flow meters can be checked and changed via a computer. The software can be downloaded for free from our website (a connector is required separately).
Price information
Prices vary depending on the quantity, so please feel free to contact us.
Delivery Time
Model number/Brand name
Burkert mass flow controller
Applications/Examples of results
■ Hydrogen station related ■ Gas flow control in thin film synthesis process ■ Ammonia removal device ■ Exhaust gas combustion device for semiconductors ■ Gas flow control for various analytical instruments ■ Plasma control and so on...
Detailed information
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We also propose gas control units that include MFCs! Not only do we offer high-performance standalone MFCs, but we also provide proposals for multiple MFCs and various sensors as a unit, taking maintenance and ease of use into consideration. Compared to conventional MFCs, our unique solution proposals (such as gas control units) can perform multiple roles with just one unit, achieving maintenance efficiency and space-saving for your gas control needs!
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New IoT Generation MFC Now Available A new MFC that supports OpenCAN and burkert dedicated BUS has been introduced, matching the IoT orientation. Connections to networks and PCs, as well as smart control of multiple MFCs, are planned to be realized sequentially. We especially encourage you to consider its introduction for mass flow in research labs and small laboratory buildings!
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OpenCAN Compatible Models: MFC Introduction The Type874X series, compatible with OpenCAN, has also been newly introduced. The Type874X series is designed to smoothly operate multiple MFCs, achieving high cost performance by using several units together. Compared to conventional mass flow controllers, it can control a wide range with just one unit, allowing us to provide solution proposals not only for individual components but also for gas control itself!
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Founded in 1946 in Southern Germany, Bürkert has been a long-established manufacturer of fluid control equipment for over 70 years, producing valves, solenoid valves, sensors, mass flow controllers, and more for various applications. Today, we have five factories in Germany and France and have grown into a global company with sales offices in 37 countries. Bürkert Japan, celebrating its 25th anniversary, offers a lineup of products tailored to Japanese standards and practices. In recent years, the introduction of IoT in many production sites has become a hot topic, with discussions not only on efficiency and cost reduction but also on predictive maintenance and smart solutions leveraging IoT. Bürkert provides solutions that easily achieve automatic regulation with IoT devices for process automation. We support various communication formats to realize IoT applications that are beneficial on-site. We offer a wide range of solutions, not only providing individual components like control valves and sensors but also system proposals, so please feel free to consult with us.