High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds.
High-speed response within 0.3 seconds! For devices with frequent changes in set flow rate! Wide pressure range support (0.01 to 1.0 MPa).
Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications that set them apart from competitors, designed for industries requiring diverse specifications, unlike those for the semiconductor industry. In addition to response speed: 【Bürkert's industrial mass flow controllers feature】 ● High pressure compatibility → Up to 1.0 MPa ● Minimum required differential pressure → 10 kPa is sufficient ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves 【Additionally, as IoT generation mass flow controllers】 ● Compatible with various communication standards EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET
basic information
【Features】 By equipping our uniquely high-performance metering valve (proportional solenoid valve), we have improved various specifications and added communication functions, giving birth to a mass flow device for the IoT generation. ◆ Actual gas calibration is performed before shipment from the factory. There is no need to individually input the conversion factor (gas coefficient). ◆ The maximum flow rate can be adjusted to meet customer conditions, minimizing full-scale error. ◆ No dedicated power supply unit is required; it can be used with a general DC 24V. ◆ We can assist with precision calculations according to the customer's required accuracy. ◆ Various settings for the mass flow controller/mass flow meter can be checked and changed via a computer. The software can be downloaded for free from our website, with no update costs!
Price information
The price varies depending on the quantity, so please feel free to contact us.
Delivery Time
Model number/Brand name
Burkert mass flow controller
Applications/Examples of results
■ Vapor Deposition Equipment (PVD) ■ Laser ■ Thermal Spraying ■ Welding ■ Cutting ■ Various Combustion Furnaces ■ Exhaust Gas Combustion Equipment ■ Cultivation Equipment ■ Refining Process ■ Thermal Analysis Equipment ■ Precision Glass Manufacturing ■ Various Fuel Cell Applications and so on
Detailed information
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We also propose gas control units that include MFCs! Not only do we offer high-performance standalone MFCs, but we also provide proposals for multiple MFCs and various sensors as a unit, taking maintenance and ease of use into consideration. Compared to conventional MFCs, our unique solution proposals (such as gas control units) can handle multiple roles with a single unit, achieving maintenance efficiency and space-saving for your gas control needs!
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The new IoT generation MFC has also arrived. It supports OpenCAN and burkert dedicated BUS, and a new MFC that matches IoT orientation has been introduced. Connection to networks and PCs, as well as smart control of multiple MFCs, are planned to be implemented sequentially. We especially encourage you to consider its use for mass flow introduction in research labs and small lab buildings!
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New MFC Models Compatible with OpenCAN The Type874X series, compatible with OpenCAN, has also been newly introduced. The Type874X series is designed to smoothly operate multiple MFCs, achieving high cost performance when used with several units. Compared to conventional mass flow controllers, it can control a wide range of functions with a single unit, allowing us to provide solution proposals not only for individual components but also for gas control itself!
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Founded in 1946 in Southern Germany, Bürkert has been a long-established manufacturer of fluid control equipment for over 70 years, producing valves, solenoid valves, sensors, mass flow controllers, and more for various applications. Today, we have five factories in Germany and France and have grown into a global company with sales offices in 37 countries. Bürkert Japan, celebrating its 25th anniversary, offers a lineup of products tailored to Japanese standards and practices. In recent years, the introduction of IoT in many production sites has become a hot topic, with discussions not only on efficiency and cost reduction but also on predictive maintenance and smart solutions leveraging IoT. Bürkert provides solutions that easily achieve automatic regulation with IoT devices for process automation. We support various communication formats to realize IoT applications that are beneficial on-site. We offer a wide range of solutions, not only providing individual components like control valves and sensors but also system proposals, so please feel free to consult with us.