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Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.

Mass flow controller (MFC) compatible with a wide range of operating pressures. It enables high-speed response within 0.3 seconds. It can also control large flow rates!

Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications tailored to different industries, setting them apart from competitors with unique features. Beyond pressure range, Bürkert's industrial mass flow controllers offer: ● Rangeability → High precision of 1:100 ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves Additionally, as IoT generation mass flow controllers, they support various communication standards: EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET.

Gas: Mass Flow Management 874x-Serie (English)

basic information

【Features】 By equipping our uniquely high-performance flow control valve (proportional solenoid valve), we have improved various specifications and added communication functions, giving birth to a mass flow device for the IoT generation. ◆ Actual gas calibration is performed before shipment from the factory. There is no need to individually input conversion factors (gas coefficients). ◆ The maximum flow rate can be adjusted to meet customer conditions, minimizing full-scale error. ◆ No dedicated power supply unit is required; it can be used with a general-purpose DC 24V. ◆ We can assist with accuracy calculations according to the customer's required precision. ◆ Various settings for the mass flow controller/mass flow meter can be checked and changed via a computer. The software can be downloaded for free from our website, with no update costs!

Price information

The price varies depending on the quantity, so please feel free to contact us.

Delivery Time

Model number/Brand name

Burkert mass flow controller

Applications/Examples of results

■ Vapor Deposition Equipment (PVD) ■ Laser ■ Thermal Spraying ■ Welding ■ Cutting ■ Various Combustion Furnaces ■ Exhaust Gas Combustion Equipment ■ Cultivation Equipment ■ Refining Process ■ Thermal Analysis Equipment ■ Precision Glass Manufacturing ■ Various Fuel Cell Applications and more

Detailed information

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Mass flow controller can be used at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa!

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