Mass flow controller with a large flow rate of 2,500L and high pressure of 1.0MPa.
High-flow, high-pressure mass flow controllers (MFC) that contribute to increasing the throughput of devices and processes.
Mass flow controllers for high flow and high pressure specifications are Bürkert! While many mass flow controllers in the industry have somewhat standardized specifications, we have learned through recent activities that customers have various requests such as "I want to achieve higher flow rates" and "I want to flow without reducing pressure." [Bürkert's industrial mass flow features] ● High flow → Capable of controlling up to 2500 Nl/min (equivalent to nitrogen) with a single unit ● High pressure specifications → Supports up to 1.0 MPa Additionally, ● Low differential pressure specifications → Supports from 5 kPa ● Tight shut-off capability → Reduces costs and space for separate solenoid valves ● Response speed → From 300 msec ● Warm-up time → 1 min [Furthermore, as an IoT generation mass flow] ● Supports various communication standards Compatible with various communications such as EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET, etc.
basic information
【Features】 Equipped with our unique high-performance flow control valve (proportional solenoid valve), we have improved various specifications and added communication functions, giving birth to a mass flow device for the IoT generation. ◆ Actual gas calibration is performed before shipment from the factory. There is no need to input individual conversion factors (gas coefficients). ◆ The maximum flow rate can be adjusted to meet customer conditions, minimizing full-scale error. ◆ No dedicated power supply unit is required; it can be used with a general-purpose DC 24V. ◆ We can assist with accuracy calculations according to the customer's required precision. ◆ Various settings for the mass flow controller/mass flow meter and self-diagnostic functions can be checked and changed via a computer. The software can be downloaded for free from our website, with no update costs!
Price information
The price varies depending on the quantity, so please feel free to contact us.
Delivery Time
Model number/Brand name
Burkert mass flow controller
Applications/Examples of results
■ Vapor deposition related equipment (PVD) ■ Laser ■ Thermal spraying ■ Welding ■ Cutting ■ Various industrial furnaces and combustion furnaces ■ Exhaust gas combustion equipment ■ Cultivation equipment ■ Refining process ■ Atomic absorption analysis equipment ■ Precision glass manufacturing ■ Various fuel cell applications etc.
Detailed information
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The new IoT generation MFC has also arrived. It supports EtherNet/IP and Burkert's dedicated BUS, and a new MFC that matches IoT orientation has been introduced. Connection to networks and PCs, as well as smart control of multiple MFCs, is planned to be implemented sequentially. We especially encourage you to consider its introduction for mass flow in research labs and small lab buildings!
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Introduction of MFC models compatible with EtherNet/IP and various field buses The Type874X series, compatible with EtherNet/IP and others, has also been newly introduced. The Type874X series is designed to smoothly use multiple MFCs, achieving high cost performance by utilizing several units together. Compared to conventional mass flow controllers, it can control a wide range with a single unit, allowing us to provide solution proposals not only for individual components but also for gas control itself!
