Wafer automatic cleaning device, cassette-less automatic cleaning device.
Demo units available for loan! We also create various designs tailored to user specifications.
The cassette-less automatic cleaning device is a precision cleaning processing device that performs a consistent process from workpiece input to drying. The equipment can be selected with a cassette-less, boat transport method, and various designs can be manufactured according to user specifications. For more details, please contact us.
basic information
**Features** - A precision cleaning processing device that performs everything from workpiece input to drying in a consistent manner. - Equipment can be selected with or without cassettes and can use a boat transport method. - Various designs can be manufactured according to user specifications. **Specifications** - Wafer size: up to φ300mm - HEPA or ULPA: built-in filter - Robot: servo motor - Chemical tank: oscillation, ultrasonic cleaning, megasonic - Rinse tank: bubbling, QDR, resistivity meter installed - ULD: ionizer (optional) - Drying: S/D, IPA V/D, lift-up ● For more details, please contact us.
Price information
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Delivery Time
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