Spin cleaning device automatic resist spin coater
【Demo units available for rental!】Both the loader and unloader can be operated by one person on the same side.
The automatic resist spin coater is a cassette-to-cassette automatic spin coater that coats resist and then also performs the baking process automatically. The processing area is arranged in a U-shape, allowing one operator to work on both the loader and unloader from the same side. A multi-joint robot is used for transportation between processes. This machine is suitable for target workpieces ranging from 2" square to 5" square substrates or φ2" to φ5" substrates. For more details, please contact us.
basic information
**Features** - Automatic spin coater for cassette-to-cassette - Coats resist and automatically executes the baking process next - Processing stages arranged in a U-shape - Loader and unloader can be operated by one operator from the same side - Transportation between processes uses a multi-joint robot - Applicable to target work: 2"□ to 5"□ substrates or φ2" to φ5" substrates **Specifications** - Dimensions (mm): W2000 × D1500 × H1750 - Loader: 1 cassette storage - Centering: Air cylinder - Cup: SUS304 Teflon coated - Rotation speed: MAX 3000 rpm - Motor: 400W AC servo motor - Transport mechanism: Multi-joint robot - Hanger: Edge clamp method - Baking: Three-stage hot plate, transport shuttle method - Unloading: 1 cassette storage ● For more details, please contact us.
Price information
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