Spin cleaning device high-performance vacuum spin coater
Demo units available for loan! Automatic N2 replacement, solvent gas introduction, vacuum state, etc.
The high-performance vacuum spin coater is a device that automatically spin coats resist liquid onto various substrates. It incorporates technology to control the atmosphere within the chamber, allowing for uniform and high-precision coatings. In other words, it automatically performs functions such as nitrogen replacement, solvent gas introduction, and maintaining a vacuum state. For more details, please contact us.
basic information
**Features** - Automatically spin coats resist liquid on various substrates - Controls the atmosphere within the chamber → Incorporates technology to achieve uniform and high-precision coatings - Automatically executes N2 replacement, solvent gas introduction, vacuum state, etc. **Specifications** - Target workpieces: 7" square, φ8", etc. - External dimensions (mm): W1500 × D1500 × H1700 - Rotating part: → Inner cup: Aluminum, anodized → Outer diameter φ300, sealed rotating type → Spin motor: AC servo motor 5.5KW → Rotational speed: MAX 3000rpm - Inner cup lid: → MAX 3000rpm → Material: Aluminum, anodized φ300 → Rotating motor: AC servo motor 3.3KW - Outer cup: φ400 SUS304 polished - Cup cleaning mechanism: Pressurized liquid supplied from cleaning liquid tank - Nozzle arm: Driven by stepping motor, 2-channel dispenser - Solvent atmosphere: Bubbling mechanism - Drying: Vacuum drying 5×10^-4 (TOrr) ● For more details, please contact us.
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