Semiconductor manufacturing equipment automatic quartz tube cleaning device

Demo units available for loan! We will accommodate according to the shape of the quartz tube, so please consult with us.

The cleanliness of the quartz tubes used in the manufacturing process of wafers greatly affects the quality of the products. Therefore, the cleaning of quartz tubes used in the diffusion process, CVD process, and annealing process is an important point. Japan Create Co., Ltd. provides quartz tube cleaning equipment that meets customer needs based on many years of experience and achievements. There are two types of systems: horizontal and vertical, and we can accommodate the shape of the quartz tubes, so please consult with us. For more details, please contact us.

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**Features** - Based on years of experience and achievements, we provide quartz tube cleaning equipment tailored to customer needs. - Available in two types: horizontal and vertical. - We can accommodate various quartz tube shapes, so please consult us. **Specifications** Horizontal Automatic Quartz Tube Cleaning Equipment (for CVD short quartz tubes) - Ideal for cleaning relatively short quartz tubes. - Main body: Iron frame covered with PVC. - Cleaning layer: Non-metal, PVC. - Transport mechanism: Front, back, up, and down rocking type. - Quartz tube: Equipped with a rotation mechanism. - Control panel: LCD touch panel. - Power supply: AC-100 to 120V, 30A. Vertical Automatic Quartz Tube Cleaning Equipment (for CVD short quartz tubes) - A device that vertically cleans the inside and outside of relatively short quartz tubes using jet cleaning. - Main body: Iron frame covered with PVC. - Rotating table: Reciprocal rotation. - Doors: Inner door and outer door, double door. - Shower nozzles: → For cleaning the inside and outside of quartz tubes. → For cleaning the booth ceiling and outside. → The same nozzle is used for pure water rinsing and N2 blowing. - Small item cleaning tank: Non-metal, PVC. - pH meter: Automatic switching drain is optional. - Control panel: LCD touch panel. - Power supply: AC-100 to 120V, 20A. ● For more details, please contact us.