Spin Cleaning Device Full Auto Spinner Model JASC-150
Development solution temperature accuracy ±1℃. Compatible with φ4", φ5", and φ6" through jig replacement!
The JASC-150 model is a fully automatic spinner with a developer solution temperature accuracy of ±1°C. It accommodates φ4", φ5", and φ6" through fixture exchange. By adopting high-precision robots, it has achieved high throughput. For more details, please contact us or refer to the catalog.
basic information
**Features** - Development liquid temperature accuracy ±1℃ - Compatible with φ4", φ5", φ6" through fixture exchange - High throughput achieved by adopting high-precision robots **Specifications** - Target workpieces: Si wafers, GaAs, glass masks, LCD glass, ceramics - Workpiece size: φ2" to □150mm - Chamber diameter and material: φ400mm SUS304 - Spin motor: AC servo motor (200W) - Rotation speed range: 0 to 5000rpm (optional maximum 8000rpm) - Rotation speed display: Digital display - Main body material and dimensions: SS + baked paint W1100×D1000×H1440mm - Recipe setting: Simple recipe setting via touch screen - Weight: 300kg - Power supply: AC100V 1.5KVa 50/60Hz ±10% - Auxiliary equipment: → Dry air: 5kgf/cm² or more φ6mm quick connector → Chemical solution, pure water: 2kgf/cm² or more φ6mm swage lock → N2: 5kgf/cm² or more φ6mm swage lock - Options: Brush nozzle related, chemical temperature controller, nozzles, fire extinguishers, etc. ● For more details, please contact us or refer to the catalog.
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