Spin Cleaning Device Automatic Resist Spin Coater Model JASC-200
Target work: Applicable to 2"□ to 5"□ substrates or φ2" to φ5" substrates!
The JASC-200 model is an automatic spin coater for cassette-to-cassette processing, which coats the resist and then automatically performs the baking process. The processing steps are arranged in a U-shape, allowing a single operator to work on the same side for loading and unloading. A multi-joint robot is used for transportation between processes. This machine is suitable for target workpieces ranging from 2" square to 5" square substrates or φ2" to φ5" substrates. For more details, please contact us or refer to the catalog.
basic information
【Features】 ○ Automatic spin coater for cassette-to-cassette ○ Automatically coats the resist and then executes the baking process ○ Processing steps arranged in a U-shape → Loader and unloader on the same side → Operable by one operator ○ Transportation between processes uses a multi-joint robot ○ Applicable to target work: 2"□ to 5"□ substrates or φ2" to φ5" substrates 【Specifications】 ○ External dimensions: W2000×D1500×H1750 ○ Loader: Holds 1 cassette ○ Centering: Air cylinder ○ Cup: SUS304 with Teflon coating ○ Rotation speed: MAX 3000rpm ○ Motor: 400W AC servo motor ○ Transport mechanism: Multi-joint robot ○ Hanger: Edge clamp method ○ Baking: Three-stage hot plate, shuttle transport method ○ Unloading: Holds 1 cassette ● For more details, please contact us or refer to the catalog.
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For more details, please contact us or refer to the catalog.
