Single-wafer processing device "Automatic Etching Device"
Install a 3-axis multi-joint clean robot at the center of the device for wafer transport!
Japan Create Co., Ltd. is a manufacturer primarily dealing with semiconductor manufacturing equipment, as well as other equipment such as LCD manufacturing devices. Since all products are manufactured in-house, we can offer them at a low cost. The "Automatic Wafer Cleaning Device" is a single-wafer automatic etching device. The wafer transport is equipped with a 3-axis multi-joint clean robot located at the center of the device, and the loader and unloader can be either FOUP or cassette type. 【Features】 - Suitable for wafers from 2 inches to 18 inches and 300mm square substrates - Uses a multi-joint robot from the loader - Automatically processes through each stage to the unloader cassette For more details, please contact us or download the catalog.
basic information
【Engineering】 ○Centering ○Loader ○Etching + Rinse ○Etching + Rinse ○Mega + Rinse ○Rinse + N2 ○Unloader ●For more details, please contact us or download the catalog.
Price information
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Delivery Time
Applications/Examples of results
For more details, please contact us or download the catalog.
