Single-wafer automatic cleaning device "RCA Wafer Cleaning System"
Customization is OK! We offer quick responses and after-sales support unique to manufacturers.
The "RCA Wafer Cleaning System" is an automatic cleaning device primarily based on RCA cleaning, widely adopted as a highly reliable cleaning method. It features a "3-axis multi-joint clean robot" for wafer transport and a "FOUP" used in the loader and unloader, achieving cleaning in a non-particle environment. 【Features】 ■ Quick response from quotes to customization ■ Support for not only our own equipment but also for other manufacturers' equipment ■ Detailed response to sudden specification changes *For more details, please download the catalog or contact us.
basic information
【Lineup】 In addition to the "RCA Wafer Cleaning Equipment," we have a wide range of products available. ■ Automatic Wafer Cleaning Equipment ■ Automatic Etching Equipment ■ Automatic Developer for Substrates ■ Automatic Wafer Resist Coating Equipment ■ Automatic Rectangular Substrate Resist Coating Equipment ■ Automatic Resist Coating and Developing Equipment *For more details, please download the catalog or contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the catalog or feel free to contact us.