Laser-type wafer surface defect inspection device - Laser Explorer
Transparent wafers also undergo high-speed inspection! High-output lasers detect tiny scratches and particles!
The "Laser Explorer" is the latest wafer surface defect inspection device that also supports transparent wafers. A high-power laser detects minute defects such as scratches, pits, and particles! It can be utilized for shipping and receiving inspections of wafers, as well as for quality control in the epitaxial process! 【Other Features】 ■ High throughput (inspects 25 wafers in a cassette in about 40 minutes) ■ Discriminates the unevenness of defects ■ Automatic focusing for all samples ■ Customizable options ■ Supports automatic inspection of one cassette ■ High-precision marking for defects (optional) ■ Defect review using a laser microscope (optional)
basic information
【Main Specifications】 (Model: LE-W1) Detection Method: Laser scattering method, reflection method, phase shift method Detected Defects: Particles, scratches, pits, hillocks, stains, etc. Target Materials: Si, SiC, GaN, LT, sapphire, etc. Target Sizes: 2, 4, 6, 8 inches (other sizes available upon consultation) Inspection Time: Approximately 90 seconds per sheet (4 inches, 10μm pitch, including transport time) Laser Wavelength: 405nm Inspection Pitch: 5 to 30μm Result Output: Map, categorized graphs, list, size classification Equipment Dimensions: W 1800 × D 990 × H 1490 (mm) *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the catalog or feel free to contact us.
Related Videos
News about this product（3）
-
[Exhibition Information] We will be exhibiting at 'SEMICON JAPAN 2025'.
We will be exhibiting Kubota's semiconductor inspection equipment at SEMICON JAPAN, an international exhibition of manufacturing technologies, equipment, and materials in the semiconductor industry. All of our staff sincerely look forward to your visit. 【Exhibition Information】 Date: December 17 (Wed) - 19 (Fri), 2025, 10:00 - 17:00 Venue: Tokyo Big Sight Booth Location: W1963 *Advance registration is required for attendance. Please check the SEMICON JAPAN website for registration details.
-
Product Introduction: Hard Disk Surface Defect Inspection Device - Laser Explorer
Detection of fine surface defects such as scratches and pits on the hard disk surface By irradiating the surface of the hard disk with a high-power laser, fine surface defects such as scratches and pits are detected, classified by defect type, and the results are displayed. The simultaneous irradiation of multiple lasers not only detects scratches with high sensitivity but also determines the uneven shapes of the defects. Features: - Detection of minute defects using high-power lasers - High scratch detection capability - Discrimination of defect unevenness - Automatic focusing for all units - Excellent cost performance - Customization support - Automatic inspection for one cassette - Compatible with transparent glass substrates
-
【Product Information】Wafer Surface Defect Inspection System 'Laser Explorer'
Transparent wafers can also be inspected at high speed! High-output lasers detect tiny scratches and particles! The 'Laser Explorer' is the latest wafer surface defect inspection device that supports transparent wafers. High-output lasers detect minute defects such as scratches, pits, and particles! It can be utilized for shipping and receiving inspections of wafers, as well as quality control in the epitaxial process! 【Other Features】 ■ High throughput (inspects 25 wafers in a cassette in about 40 minutes) ■ Discriminates the unevenness of defects ■ Automatic focus for all samples ■ Customization available ■ Automatic inspection for one cassette ■ High-precision marking for defects (optional) ■ Defect review using a laser microscope (optional)
Recommended products
Distributors
Kubota has supported a rich society and the circulation of nature by addressing issues related to food, water, and the environment, which are essential for human survival. The Kubota Precision Equipment Business Unit and Kubota Instrumentation provide solutions based on "measurement and metrology technology" that meet the demands of various industries for automation, labor saving, high-precision measurement and control, and data processing, contributing to the development of society.