Microscopic wafer surface defect inspection device
High-precision inspection equipment compatible with transparent materials.
This is a surface defect inspection device equipped with a differential interference microscope, applicable to transparent materials. It is capable of outputting defect maps through comprehensive inspections and allows for microscopic observation of detected defects. ■ Features of the device - Defect extraction and discrimination functions using proprietary image processing technology - High-precision marking while observing defects - Enables observation and creation of defect albums based on defect coordinates for wafers inspected by other devices - Development of a crystal defect detection function is underway
basic information
【Detection】 Method: Image analysis method using differential interference microscopy Detection size: 0.3um (when using a 10x objective lens) 【Target Substrate】 Type: Various substrates including transparent materials Size: 4 inch, 6 inch, 8 inch, available upon separate consultation 【Device Size】 External dimensions: W1,700 x D1,000 x H1,935 (mm) Weight: Approximately 800kg
Price information
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Model number/Brand name
K-IM-G100
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Kubota has supported a rich society and the circulation of nature by addressing issues related to food, water, and the environment, which are essential for human survival. The Kubota Precision Equipment Business Unit and Kubota Instrumentation provide solutions based on "measurement and metrology technology" that meet the demands of various industries for automation, labor saving, high-precision measurement and control, and data processing, contributing to the development of society.