Wafer appearance inspection equipment (automatic visual inspection equipment)
Automating visual inspection of wafer defects.
■This is a device that responds to the following requests and concerns! - We want to automate visual inspection of defects on wafers (substrates). - We want to reduce and prevent variability in pass/fail judgments among inspectors. - We want to save inspection data and trace quality. - We want to automatically discriminate defects. ■Features of the device - It can automatically detect, extract, and discriminate visually identifiable defects. - We can propose an optical system optimized for the types of defects. - We can suggest both manual and automatic transport (cassette to cassette). - It also implements AI functions, allowing for improved defect discrimination accuracy through ongoing learning.
basic information
【Minimum Detectable Defect】 30um 【Target Shape】 Circular: Diameter less than 200mm Rectangular: Less than 140mm□ *If you would like to measure sizes larger than the above, please consult us. 【Inspection Time】 100 PPH
Price information
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Delivery Time
Model number/Brand name
K-VI-G100
Applications/Examples of results
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