[Analysis Case] Evaluation of Copper (Cu) Oxide Film Thickness: Differences Due to Storage Environment

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Layer Structure and Film Thickness of Naturally Oxidized Copper (Cu) Surface Film

Depth-direction state evaluation using TOF-SIMS.

最終更新日 Mar 13, 2025

[Analysis Case] Depth Direction Analysis of Thin Carbon Films

Depth-direction analysis of diamond-like carbon (DLC) and graphene is possible.

最終更新日 Mar 13, 2025

[Analysis Case] High-Precision Quantification of the sp2/(sp2+sp3) Ratio of DLC Films

High-precision analysis using XAFS

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of the sp2/(sp2+sp3) Ratio of DLC Films

Evaluation of the sp2/(sp2+sp3) ratio using C1s waveform analysis.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Work Function After Thin Film Surface Treatment

UPS analysis after surface plasma treatment of ITO.

最終更新日 Mar 13, 2025

Valence evaluation of metal oxides by chemical shift

XPS: X-ray Photoelectron Spectroscopy

最終更新日 Mar 12, 2025

Evaluation of the orientation angle of organic film materials

XAFS: X-ray Absorption Fine Structure

最終更新日 Mar 12, 2025

Types and Characteristics of Electron Diffraction

TEM: Transmission Electron Microscopy

最終更新日 Mar 12, 2025

Detection of trace components by P&T of volatile organic compounds (VOCs)

GC/MS: Gas Chromatography-Mass Spectrometry

最終更新日 Mar 12, 2025

[Analysis Case] Surface Contamination Assessment of Si Wafers Stored Using TOF-SIMS

Evaluation of contamination and oxidation of Si wafers after removing the oxide film with hydrofluoric acid treatment.

最終更新日 Mar 13, 2025

[Analysis Case] Qualitative Analysis of Powder Contaminants

By combining techniques, it is possible to obtain multiple types of component information.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of the Condition of Foreign Matter with Surface Oxidation Film

Evaluation of aluminum hydroxide Al(OH)3 and aluminum oxide Al2O3 is possible.

最終更新日 Mar 13, 2025

[Analysis Case] Structural Analysis of Polyimide Resin

Structural analysis of polyimide resin is possible using thermal decomposition GC/MS method.

最終更新日 Mar 13, 2025

[Analysis Case] Low-Temperature PL Spectrum of Si After Ion Implantation Annealing Treatment

It is possible to confirm the recovery of crystallinity due to irradiation defects and annealing.

最終更新日 Mar 13, 2025

[Analysis Case] Analysis of Corrosive Components in Indoor Atmosphere

It is possible to analyze ion components in the atmosphere using the impinger collection method.

最終更新日 Mar 13, 2025

Gas analysis using the heart-cut EGA method.

GC/MS: Gas Chromatography-Mass Spectrometry

最終更新日 Mar 12, 2025

[Analysis Case] Evaluation of Silicon Oxide Film by XAFS

Local structural analysis around silicon, quantification of intermediate oxides, evaluation of bulk and interfaces.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of the Depth Distribution of B near the Si Surface using SIMS

High-precision B profile analysis through sample cooling.

最終更新日 Mar 13, 2025

[Analysis Case] Structural Evaluation of Carbon Films

Evaluation of structural specificity, crystallinity, and sp3 characteristics.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Flux Cleaning Residue

We capture the minute and ultra-thin residue as an image.

最終更新日 Mar 13, 2025

[Analysis Case] Analysis of Organic Foreign Substances on Printed Circuit Boards

Reduce the impact of foreign object surrounding information with appropriate sampling.

最終更新日 Mar 13, 2025

[Analysis Case] Analysis of Organic Foreign Substances on Printed Circuit Boards

Reduce the impact of foreign matter surrounding information through appropriate sampling and microscopic measurement.

最終更新日 Mar 13, 2025

Analysis of eluted components from printed circuit boards.

It is possible to analyze cation components in liquid samples.

最終更新日 Mar 13, 2025

[Analysis Case] Investigation of the Causes of Surface Stains and Water Repellency on Parts Using TOF-SIMS

Properly sampling and measuring surface contamination even on large parts that cannot be cut.

最終更新日 Mar 13, 2025

[Analysis Case] Observation of the Surface Morphology of ZnO Films

Capable of observing large-area surface shapes.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Organic Residue Amount in Cleaning Rinse Solution

Evaluation using TOC and LC/MS/MS is possible!

最終更新日 Mar 13, 2025

[Analysis Case] Observation of Crosshatch Pattern Shape

It is possible to visualize small irregularities with high vertical resolution.

最終更新日 Mar 13, 2025

[Analysis Case] Evaluation of Damage Layer on Polymer Surface Due to Ion Irradiation

By using GCIB (Ar cluster), it is possible to evaluate the composition and thickness of the damaged layer.

最終更新日 Mar 13, 2025

Micro-sampling method

FIB: Focused Ion Beam Processing

最終更新日 Mar 12, 2025