[Analysis Case] Depth Profile Analysis of Dopant Elements in SiC Using SIMS 2

Measurements will be taken according to the analysis conditions suited to the purpose.

last updated Mar 13, 2025

[Analysis Case] Analysis of the Multilayer Structure of Polymer Films

Clear visualization of the layer structure of multilayer films using low-damage sputtering with GCIB.

last updated Mar 13, 2025

[Analysis Case] Observation of Puff Surface Shape

Observation of the puff surface using a digital microscope.

last updated Mar 13, 2025

[Analysis Case] Concentration Analysis of Harmful Components in Food

Evaluation of melamine concentration in infant formula milk powder

last updated Mar 13, 2025

[Analysis Case] Composition Analysis of Compound Semiconductors by SIMS

Capable of evaluating the composition of the main elemental components of compound semiconductors in the depth direction.

last updated Mar 13, 2025

Analysis case: Evaluation of the in-plane distribution of additives in solder alloys.

Capable of highly sensitive evaluation of the distribution of additives at the ppm level.

last updated Mar 13, 2025

[Analysis Case] SSDP-SIMS Analysis of Mg in GaN-based LED Structure

It is possible to obtain the impurity profile in the GaN-based LED structure from the backside.

last updated Mar 13, 2025

[Analysis Case] Composition Analysis of GaN-based LED Structures using SIMS

Capable of evaluating the composition of the main elemental components of GaN-based LEDs in the depth direction.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Cleaning Effect of Organic Ingredients

You can measure the 300mm wafer as it is.

last updated Mar 13, 2025

[Analysis Case] SSDP-SIMS Analysis on SiC Substrates

It is possible to obtain the dopant concentration profile from the SiC substrate side.

last updated Sep 17, 2025

[Analysis Case] Evaluation of Gate Oxide Film on SiC Substrate

Evaluate film thickness, density, and bonding state.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Foreign Substances on the Surface of 300mm Wafers

The coordinate linkage function with the foreign object inspection device allows for the evaluation of specific foreign objects.

last updated Mar 13, 2025

[Analysis Case] SIMS Analysis of Compound Layered Structure Samples

Analysis is possible after selectively removing the compound layer through preprocessing.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Dopant and Carrier Concentration Distribution in Power Devices

Evaluation of activation rate is possible through composite analysis.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Carrier Density Distribution in Power Devices

Evaluation of the activation rate of the Dopant is possible.

last updated Mar 13, 2025

[Analysis Case] Quality Evaluation of SiC Substrates

Evaluation of crystal orientation, in-plane defect distribution, surface roughness, and impurities.

last updated Mar 13, 2025

[Analysis Case] Dopant Investigation in NPT-IGBT Using SIMS

Evaluation of localized elements is possible with imaging SIMS.

last updated Mar 13, 2025

[Analysis Case] Depth Profile Concentration Analysis of Impurities in GaN-based LEDs Using SIMS

Measurements will be taken under analysis conditions suited to the purpose.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Element Distribution in Textured GaN-based LEDs

Even with a structure that has uneven surfaces, depth distribution evaluation is possible through flattening processing.

last updated Mar 13, 2025

[Analysis Case] Diffusion Evaluation of Ga and Al in Si Substrate using SSDP-SIMS

Measurement avoiding the influence of high concentration layers using SSDP-SIMS.

last updated Sep 17, 2025

[Analysis Case] SIMS Measurement of Specially Shaped Samples

Analysis is possible even for special shapes through innovative fixing methods.

last updated Sep 17, 2025

[Analysis Case] Evaluation of Si Natural Oxidation Film Thickness

Estimation of film thickness using the average free path of photoelectrons.

last updated Sep 17, 2025

[Analysis Case] Evaluation of Impurities in Metal Wires

Visualizing the in-plane distribution of impurities such as atmospheric components with a field equivalent to SEM.

last updated Sep 17, 2025

[Analysis Case] Photoluminescence Mapping Measurement of SiC Diodes

Detection cases of stacking faults in SiC.

last updated Mar 13, 2025

[Analysis Case] Evaluation of SUS Passive Film Depth Direction State and Oxide Film Thickness

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

last updated Mar 13, 2025

[Analysis Case] Distribution and State Evaluation of OH on Aluminum (Al) Surface

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Silicon (Si) Oxide Film State

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Electrode Materials for Lithium-Ion Secondary Batteries

Cross-sectional observation using atmosphere-controlled ion polishing (IP) processing is possible.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Lithium-Ion Secondary Battery Separators

Cool the sample and evaluate the shape of the separator more accurately.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Si Anode in Lithium-Ion Secondary Batteries

It is possible to evaluate the structure of the Si anode after charging through sample cooling.

last updated Mar 13, 2025