Automated Transport System "EFEM Series"
Equipment Front End Module Full Panel Size Compatible Automatic Transporter
Introducing the Equipment Front End Module full panel size compatible automatic transport system "EFEM Series." The "EFEM Series" is an automatic transport system compatible with full panel sizes (510×515mm/600×600mm). It utilizes robots manufactured by our group company, Nidec Instruments, and can be customized in various ways to meet customer needs! Please feel free to contact us.
basic information
- Full panel size support: 510×515mm / 600×600mm - Number and arrangement of load ports - Various customizations are possible, including panel rotation mechanisms!
Price range
Delivery Time
Model number/Brand name
EFEM Series
Applications/Examples of results
Wafer panel transportation
catalog（1）
Download All Catalogs
Recommended products
Distributors
Our inspection target areas include printed circuit boards, semiconductor packages, and display panels. These are core components of information and communication devices that are growing increasingly due to advancements in IT, as well as widely adopted digital home appliances. Printed circuit boards, semiconductor packages, and display panels are evolving at an astonishing speed, and higher precision technologies are required in inspections. Our company holds a significant share in these inspection fields that demand cutting-edge technology, and we have delivered numerous products recognized as "de facto standards" in the industry worldwide.