0.1 nm resolution piezo nano actuator P-753
15–38 µm stroke, 0.1 nm resolution, compact high-speed response piezo stage
P-753 is a one-axis piezo nano positioning stage that controls a travel range of 15 to 38 µm with a resolution of 0.1 nm. By measuring the actual movable part with a two-electrode capacitive sensor and utilizing a frictionless structure with flexure guides, it achieves nanometer-level motion and positioning within a few milliseconds. *For more details, please download the PDF or contact us.*
basic information
- Highly versatile design: Flexure stage or actuator - Resolution of 0.05 nm, high-speed response - High linearity with capacitive sensors - Extremely high straightness of motion achieved with frictionless precision flexure guides - Remarkable long lifespan with PICMA(TM) piezo actuators - Vacuum-compatible and non-magnetic versions available *For more details, please download the PDF or contact us.
Price information
Please feel free to contact us.
Delivery Time
Applications/Examples of results
Application examples - Disk drive inspection - Various measurements - Nano positioning - Scanning microscopy - Photonics / Optical integrated circuits - Interferometer - Biotechnology - Micromanipulation
