XY stage
XY stage
Our company utilizes its own developed products in the field of PIMag® magnetic linear motors and PIglide air bearings. Our high-load XY stages and planar scanners make a significant contribution to industrial production sites and quality control.
1～21 item / All 21 items
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PIMag Linear Motor XY Axis Stage 'L-731/V-731'
Linear motor stage capable of high-precision positioning for industrial medical applications, laser cutting, scanning, and more!
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300mm High-Speed XY Air Bearing Planar Scanner A-311
Zero wear with air levitation and linear motor. Maximum speed 2m/s, sensor resolution 1nm.
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PILine XY Stage "U-723"
Compact XY-axis stage with 22mm motion driven by piezo motor, self-locking for position holding.
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High-Precision Rotary Stage V-62x Series for Measurement and Inspection
Achieves high-speed and high-precision operation with high rigidity and less than 1µm of eccentricity and flatness with an open structure.
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Direct Drive High Precision Rotary Stage for Laser Processing
High-rigidity rotary stage with an opening, achieving less than 1µm of eccentricity and flatness with high speed and high precision.
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Air Bearing A-311 for Semiconductor Inspection
Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.
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Optical Air Bearing A-311
Zero wear with air levitation and linear motor. Maximum speed 2 m/s, sensor resolution 1 nm.
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Air Bearing A-311 for Electronic Components
Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.
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Motion Controller A-81x PIglide Compatible with 1 to 4 Axes
Achieves outstanding expandability and space-saving performance with 1 to 4 axes in a single unit.
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Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing
Innovating the semiconductor manufacturing process with nanometer-level precision.
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Air Bearing Rotary Stage A-62x for Measurement and Inspection
Contributing to the improvement of calibration work accuracy with zero friction rotational precision.
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A-62x Air Bearing Rotary Stage for Optical Adjustment
Supports optical system adjustments with nanometer-level precision.
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Piezo Motor Microscope XY Axis Stage U-781 PILine
Achieves high-speed and high-precision scanning with a maximum speed of 120mm/s and a resolution of 10nm.
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U-723 Small Linear Stage for Microscope XY Axis
For positioning samples in a microscope. High precision, space-saving, self-locking.
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X-365 High-Precision Modular XY Gantry System
XY mechanism that combines precision, rigidity, and flexibility.
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High Load Linear Motor Stage V-D07 | 1000N Load Capacity & High Precision
Long lifespan and high rigidity design | Achieving precise and smooth operation even in high-load environments
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High-load linear motor stage for laser microfabrication V-D07
Precision and smooth adjustment work for optical instruments. High-precision linear stage.
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High-Precision XY Axis Linear Motor Stage for Microscopes V-P01
High-Precision XY Stage V-P01 for Microscope Observation and Automatic Imaging
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High-precision XY axis linear motor stage V-P01 (supports precise positioning)
Equipped with a three-phase linear motor that achieves high speed and high acceleration. Supports high-precision scanning.
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High-precision rotating module A-60x adopting non-contact air bearing technology
Air bearing module that achieves ultra-high precision rotation with zero friction.
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XY Multi-Axis Motion System X-417 for Optical Adjustment
High-precision multi-axis system corresponding to the XY+Z configuration. Optimal configuration can be achieved according to the application.
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