High-Precision Rotary Stage V-62x Series for Measurement and Inspection
Achieves high-speed and high-precision operation with high rigidity and less than 1µm of eccentricity and flatness with an open structure.
In measurements, testing, and inspections, accurate precision is required. Reducing errors and precise positioning are essential. The Direct Drive High-Precision Rotary Stage V-62x series supports accurate calibration work with less than 1µm of eccentricity and flatness. 【Application Scenarios】 - Optical measurement and inspection - Precision inspection of semiconductors and electronic components - Calibration of sensors and measuring instruments 【Benefits of Implementation】 - Reduction of measurement errors and improvement of reproducibility - High-precision and stable angular positioning - Enhanced measurement reliability through long-term stable operation
basic information
**Features** - Efficient dynamic performance through direct drive - Motion platform with diameters of 85 mm, 110 mm, and 210 mm - Eccentricity and flatness < 1 μm - Slim design **Our Strengths** Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal solutions tailored to our customers' needs. We support our customers with a wide range of products, including the world's number one piezo stage, and extensive knowledge in positioning.
Price range
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Model number/Brand name
V-62x
Applications/Examples of results
- Sample inspection - Precision micro-assembly - Research - Biotechnology - Semiconductor inspection and measurement - Automation - Device assembly - Laser micromachining - Sensor calibration and testing *For more details, please refer to the catalog or feel free to contact us.*
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.










