静電容量センサー
静電容量センサー
サブナノ精度の位置計測を可能にするピーアイの容量式センサー。非接触・直接計測により高精度位置決めや振動測定に対応しています。
1～7 item / All 7 items
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2-Electrode Capacitive Sensor D-050/D-100 High-Resolution Nano Measurement
Maximum measurement range of 150µm, compatible with high-precision nano displacement control.
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Single Electrode Capacitive Sensor D-510 for Fine Position Measurement
Non-contact displacement measurement sensor with a resolution of less than 1 nm and a maximum bandwidth of 10 kHz.
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High-Resolution Capacitive Sensors for Precision Machinery D-050・D-100
Non-contact displacement sensor with a measurement range of up to 300µm and a resolution of 0.01nm.
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High-Resolution Capacitive Sensors for Nanotechnology D-050・D-100
Achieving nano displacement measurement with sub-nanometer resolution. An optimal non-contact displacement sensor for nano material evaluation and nano positioning.
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Sub-nanometer resolution capacitive displacement sensor D-510 for precision machinery
Non-contact displacement measurement with sub-nanometer resolution. Contributing to position control and improved machining accuracy of precision processing equipment.
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D-510 Sub-Nanometer Resolution Capacitive Displacement Sensor for Research and Development
Achieving sub-nanometer resolution and a maximum bandwidth of 10 kHz for non-contact displacement measurement at the nano level.
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Capacitance Sensor D-510 for Semiconductor Device Nano Displacement Measurement
Sub-nanometer resolution and a maximum bandwidth of 10 kHz. Non-contact capacitive sensor ideal for wafer position control.
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