Single Electrode Capacitive Sensor D-510 for Fine Position Measurement
Non-contact displacement measurement sensor with a resolution of less than 1 nm and a maximum bandwidth of 10 kHz.
The D-510 PISeca is a single-electrode capacitive sensor that achieves a maximum measurement range of 500µm and a resolution of less than 1nm. The sensor probe is easy to install with a LEMO connector. Uniformity of the electric field is ensured by the guard ring electrode, achieving high linearity (maximum 0.1%). When combined with dedicated electronics such as the E-852.10, it enables excellent nanometer-level displacement measurements with both static and dynamic resolution.
basic information
- Non-contact measurement of distance/movement/vibration - Absolute position detection - Sub-nanometer resolution - Measurement range up to 500μm - Easy to integrate - Compatible with high frequency bands *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
PISeca
Applications/Examples of results
- Semiconductor manufacturing/testing and measurement - Precision machining *For more details, please refer to the catalog or feel free to contact us.
