300mm High-Speed XY Air Bearing Planar Scanner A-311

Zero wear with air levitation and linear motor. Maximum speed 2m/s, sensor resolution 1nm.

last updated Feb 17, 2026

Small Linear Air Bearing Stage A-143 High Precision Type

Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.

last updated Dec 22, 2025

A-63x Series High-Precision Air Bearing Rotary Stage

It is a slim, high-precision air bearing rotary stage available in four different sizes based on variations in drive area and load capacity, and it supports two types of encoders.

last updated Mar 18, 2026

Hemisphere Air Bearing Module A-65x High Load Capacity Specification

Optimal contactless structure for space and microgravity environment simulation.

last updated Mar 11, 2026

Optical Air Bearing A-311

Zero wear with air levitation and linear motor. Maximum speed 2 m/s, sensor resolution 1 nm.

last updated Feb 17, 2026

Air Bearing A-311 for Semiconductor Inspection

Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.

last updated Feb 17, 2026

Air Bearing A-311 for Electronic Components

Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.

last updated Feb 17, 2026

Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing

Innovating the semiconductor manufacturing process with nanometer-level precision.

last updated Feb 17, 2026

Air Bearing Rotary Stage A-62x for Measurement and Inspection

Contributing to the improvement of calibration work accuracy with zero friction rotational precision.

last updated Feb 17, 2026

A-62x Air Bearing Rotary Stage for Optical Adjustment

Supports optical system adjustments with nanometer-level precision.

last updated Feb 17, 2026

PIglideA-121 High Precision Model for Optical Alignment

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

last updated Mar 19, 2026

PIglideA-121 High Precision Model for Semiconductor Testing

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

last updated Mar 19, 2026

[For FPD Manufacturing] Small Linear Air Bearing Stage A-143

Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.

last updated Jan 23, 2026

A-143 High Precision Linear Stage for Laser Processing

Improving the precision of laser cutting. Achieving high-precision positioning of ±0.2 µm.

last updated Jan 23, 2026

Air bearing rotary stage PIglideA-62x high precision model

Zero friction rotation accuracy. Ideal for optical inspection with flatness below 200nm.

last updated Dec 22, 2025

Linear Air Bearing Stage PIglideA-121 High Precision Model

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

last updated Mar 19, 2026

Air Bearing Voice Coil Linear Stage A-142PIglide

Achieves high-speed and smooth sub-micron operation with 5nm resolution at 200mm/s.

last updated Dec 22, 2025

PIglide Linear Air Bearing Stage 'A-110'

Air bearing stage optimal for scanning or high-resolution positioning.

last updated Mar 17, 2026

High-precision rotating module A-60x adopting non-contact air bearing technology

Air bearing module that achieves ultra-high precision rotation with zero friction.

last updated Mar 11, 2026

A-688 type air bearing large aperture rotating stage

A high-precision air bearing rotary stage with a slim design and a maximum opening of 260mm. It is not affected by friction or component accuracy associated with conventional mechanical guides.

last updated Mar 11, 2026

Compact Linear Air Bearing Stage for Precision Measurement A-143

A compact air bearing stage that achieves zero friction and high-precision positioning.

last updated Jan 23, 2026

[A-143 High Precision Linear Air Bearing Stage for Semiconductor Manufacturing]

A compact stage that achieves zero friction and high-precision positioning of ±0.2 µm.

last updated Jan 23, 2026

Compact Linear Air Bearing Stage for Optical Equipment A-143

Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.

last updated Jan 23, 2026

Optical Large Aperture Air Bearing Rotary Stage A-68x

Thin and high-precision air bearing rotation stage, ideal for optical system adjustments.

last updated Mar 11, 2026

Multi-axis motion system X-417

It is possible to configure combinations that match the required number of axes and operational specifications according to the application.

last updated Mar 12, 2026

[For Research and Development] Flexibly Configurable Multi-Axis Motion System X-417

A multi-axis motion system that can be freely configured with the number of axes and specifications according to the application.

last updated Mar 12, 2026

Air Bearing Stage A-110 for High Precision Positioning in Optics

For precise adjustment of optical systems. Air bearing stage that achieves high-precision positioning.

last updated Mar 17, 2026

【For Measurement Calibration】Load Capacity Maximum 100N Air Bearing A-110

Air bearing stage that supports high-precision calibration work.

last updated Mar 17, 2026

New product! Thin Air Bearing Z Tip/Tilt Stage

Releasing a high-precision air bearing stage with 3-axis motion on a single thin platform!

last updated Mar 17, 2026

[For Semiconductor Manufacturing] Z Direction / Chip/Tilt Stage Operation A-523

A high-precision air bearing stage capable of 3-axis motion on a single thin platform.

last updated Mar 17, 2026