エアベアリング

エアベアリング
ピーアイのエアベアリングは、非接触エアベアリングとダイレクトドライブにより摩擦ゼロの滑らかな動作を実現。ナノレベル精度と優れた直進性で高精度の位置決めに対応しています。
1~30 item / All 33 items
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300mm High-Speed XY Air Bearing Planar Scanner A-311
Zero wear with air levitation and linear motor. Maximum speed 2m/s, sensor resolution 1nm.
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Small Linear Air Bearing Stage A-143 High Precision Type
Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.
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A-63x Series High-Precision Air Bearing Rotary Stage
It is a slim, high-precision air bearing rotary stage available in four different sizes based on variations in drive area and load capacity, and it supports two types of encoders.
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Hemisphere Air Bearing Module A-65x High Load Capacity Specification
Optimal contactless structure for space and microgravity environment simulation.
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Optical Air Bearing A-311
Zero wear with air levitation and linear motor. Maximum speed 2 m/s, sensor resolution 1 nm.
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Air Bearing A-311 for Semiconductor Inspection
Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.
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Air Bearing A-311 for Electronic Components
Non-contact drive using air bearings and linear motors. Contributes to the acceleration and stabilization of substrate and component inspection.
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Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing
Innovating the semiconductor manufacturing process with nanometer-level precision.
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Air Bearing Rotary Stage A-62x for Measurement and Inspection
Contributing to the improvement of calibration work accuracy with zero friction rotational precision.
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A-62x Air Bearing Rotary Stage for Optical Adjustment
Supports optical system adjustments with nanometer-level precision.
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PIglideA-121 High Precision Model for Optical Alignment
Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.
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PIglideA-121 High Precision Model for Semiconductor Testing
Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.
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[For FPD Manufacturing] Small Linear Air Bearing Stage A-143
Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.
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A-143 High Precision Linear Stage for Laser Processing
Improving the precision of laser cutting. Achieving high-precision positioning of ±0.2 µm.
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Air bearing rotary stage PIglideA-62x high precision model
Zero friction rotation accuracy. Ideal for optical inspection with flatness below 200nm.
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Linear Air Bearing Stage PIglideA-121 High Precision Model
Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.
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Air Bearing Voice Coil Linear Stage A-142PIglide
Achieves high-speed and smooth sub-micron operation with 5nm resolution at 200mm/s.
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PIglide Linear Air Bearing Stage 'A-110'
Air bearing stage optimal for scanning or high-resolution positioning.
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High-precision rotating module A-60x adopting non-contact air bearing technology
Air bearing module that achieves ultra-high precision rotation with zero friction.
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A-688 type air bearing large aperture rotating stage
A high-precision air bearing rotary stage with a slim design and a maximum opening of 260mm. It is not affected by friction or component accuracy associated with conventional mechanical guides.
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Compact Linear Air Bearing Stage for Precision Measurement A-143
A compact air bearing stage that achieves zero friction and high-precision positioning.
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[A-143 High Precision Linear Air Bearing Stage for Semiconductor Manufacturing]
A compact stage that achieves zero friction and high-precision positioning of ±0.2 µm.
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Compact Linear Air Bearing Stage for Optical Equipment A-143
Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.
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Optical Large Aperture Air Bearing Rotary Stage A-68x
Thin and high-precision air bearing rotation stage, ideal for optical system adjustments.
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Multi-axis motion system X-417
It is possible to configure combinations that match the required number of axes and operational specifications according to the application.
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[For Research and Development] Flexibly Configurable Multi-Axis Motion System X-417
A multi-axis motion system that can be freely configured with the number of axes and specifications according to the application.
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Air Bearing Stage A-110 for High Precision Positioning in Optics
For precise adjustment of optical systems. Air bearing stage that achieves high-precision positioning.
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【For Measurement Calibration】Load Capacity Maximum 100N Air Bearing A-110
Air bearing stage that supports high-precision calibration work.
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New product! Thin Air Bearing Z Tip/Tilt Stage
Releasing a high-precision air bearing stage with 3-axis motion on a single thin platform!
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[For Semiconductor Manufacturing] Z Direction / Chip/Tilt Stage Operation A-523
A high-precision air bearing stage capable of 3-axis motion on a single thin platform.
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