Small Linear Air Bearing Stage A-143 High Precision Type
Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.
The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².
basic information
- Operating area: 85 mm × 75 mm - Low profile: 40 mm - Travel range: 25 mm - Load capacity: 4 kg - Speed: 390 mm/s - Acceleration: 10 m/s² *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
- X-axis stage of high-precision measurement equipment - Fine positioning of optical elements (including fiber alignment) - Transport system for pattern formation and lithography - Precision stage for scanning systems - Transport section of semiconductor wafer inspection equipment - Non-contact linear motion control in medical devices - Testing equipment and analytical instruments in cleanroom environments *For more details, please refer to the catalog or feel free to contact us.
