Compact Linear Air Bearing Stage for Precision Measurement A-143
A compact air bearing stage that achieves zero friction and high-precision positioning.
In the field of precision measurement, high-accuracy positioning is essential. Particularly in the measurement and inspection of fine structures, even slight vibrations or errors can significantly impact the measurement results. The A-143 PIglide, with its non-contact structure, eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms, making it ideal for measurement applications that require nanometer-level precision. 【Application Scenarios】 - Precision measurement instruments - Inspection devices - Optical equipment 【Benefits of Implementation】 - Achievement of high-accuracy measurement results - Establishment of a stable measurement environment - Reduction of long-term operational costs
basic information
【Features】 - Zero friction non-contact structure - High precision positioning of ±0.2 µm within a movement range of 25 mm - Minimum increment of 0.025 µm - Built-in linear motor and 32-bit BiSS-C encoder - Maximum speed of 390 mm/s and maximum acceleration of 10 m/s² 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal positioning solutions tailored to our customers' needs. We offer a wide range of products, including piezo stages, as well as peripheral equipment such as granite bases, and we can also propose complex systems.
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Model number/Brand name
A-143 PIglide Small Linear Air Bearing Stage
Applications/Examples of results
- X-axis stage of high-precision measurement equipment - Fine positioning of optical elements (including fiber alignment) - Transport system for pattern formation and lithography - Precision stage for scanning systems - Transport section of semiconductor wafer inspection equipment - Non-contact linear motion control in medical devices - Testing equipment and analytical instruments in a cleanroom environment *For more details, please refer to the catalog or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.