A-63x Series High-Precision Air Bearing Rotary Stage
It is a slim, high-precision air bearing rotary stage available in four different sizes based on variations in drive area and load capacity, and it supports two types of encoders.
The air bearing rotation stage is not affected by friction or component precision from conventional mechanical guides due to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling very high-precision positioning due to its high flatness and minimal eccentricity. ● For more details, please contact us or refer to the catalog.
basic information
Range of motion: > 360° Drive surface diameter: 150mm to 350mm Eccentricity: 100 to 200nm Flatness: 50 to 75nm Wobble: 1μrad to 2µrad Load capacity: 190 to 1200N Built-in sensors: Incremental/Absolute Maximum speed: 500rpm
Price range
Delivery Time
Applications/Examples of results
- Tomography - Beamline system - High-precision measurement & inspection - Ultra-precision measurement device - Calibration - XCT scanning
