Air bearing rotary stage PIglideA-62x high precision model
Zero friction rotation accuracy. Ideal for optical inspection with flatness below 200nm.
The PIglide A-62x series is an air-bearing rotary stage designed to pursue high precision and high stability required for optical alignment and precision inspection applications. With frictionless, non-contact rotation, it minimizes wobble and eccentricity to the extreme. Flatness and eccentricity are achieved at less than 200nm, enabling control at the nanometer level. Thanks to the torque motor and optional absolute encoders, positioning is both fast and safe. It is compatible with clean room environments and can be installed both horizontally and vertically, allowing for flexible system configurations tailored to experimental conditions.
basic information
- Specifications - Cleanroom compatible - Motion platform diameter 50mm to 300mm - Maximum load capacity 4170N - Eccentricity and flatness <200 nm - Can be installed vertically or horizontally *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
- Alignment adjustment of precision optical components - High-precision rotation stage in measuring instruments - Inspection process for optical communication components - Calibration equipment for image sensors - Constant-speed rotation scanning of wafers and optical elements - Nano-precision positioning in clean rooms *For more details, please refer to the catalog or feel free to contact us.*