[For Semiconductor Manufacturing] Z Direction / Chip/Tilt Stage Operation A-523
A high-precision air bearing stage capable of 3-axis motion on a single thin platform.
In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Especially in fine processing and inspection processes, nanometer-level positioning accuracy is required. In environments susceptible to vibrations and thermal influences, stable positioning performance is essential. Our thin air bearing Z Tip/Tilt stage achieves ultra-high precision positioning in three axes, contributing to improved positioning accuracy and productivity in semiconductor manufacturing. 【Application Scenarios】 - Wafer probing - Mask alignment - Fine processing - Inspection processes 【Benefits of Implementation】 - Quality improvement through high-precision positioning - High durability due to a frictionless motion platform - Miniaturization of equipment due to a thin design - Flexible response through three-axis operation
basic information
【Features】 - Travel range: Z-axis ±2.5 mm, θX, θY axes ±1° - Load capacity: 8 kg - Platform: Diameter 250 mm - Height: 60 mm - Frictionless motion platform 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.
Price range
Delivery Time
Model number/Brand name
PIglide High Precision Z Chip/Tilt Air Bearing Stage A-523
Applications/Examples of results
Wafer inspection Fiber alignment Optical system alignment Flat screen inspection Maskless lithography MicroLED manufacturing and other high-precision applications
Related Videos
catalog（1）
Download All Catalogs
Recommended products
Distributors
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.