Air Bearing A-311 for Semiconductor Inspection
Achieving high-speed and high-precision wafer inspection with air levitation and linear motors.
In the semiconductor industry, high-precision inspection is essential for quality control of wafers and improving yield. In particular, the detection of fine defects and foreign substances is a crucial factor that affects product reliability. Traditional inspection methods have limitations in inspection speed and resolution, which can lead to increased takt time and decreased inspection accuracy. The PIglide IS A-311 achieves high-speed and high-precision wafer inspection through a combination of air bearings and linear motors, addressing these challenges. 【Application Scenarios】 - Inspection of foreign substances on wafer surfaces - Measurement of pattern dimensions - Defect detection 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield
basic information
【Features】 - Ideal for scanning applications and high-precision positioning - Cleanroom compatible - Movement range of 300mm x 300mm - Load capacity of up to 147N - Resolution of up to 1nm 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal solutions tailored to our customers' needs. We offer a wide range of products, including linear motor stages, air bearing stages, and piezo stages, as well as proposals for combined systems with granite bases.
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Model number/Brand name
A-311 PIglide IS Pranau Scanner (with air bearing)
Applications/Examples of results
It is ideal for high-precision applications such as inspection systems, laser marking, microscope inspection, and scanning.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.