PIglideA-121 High Precision Model for Semiconductor Testing
Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.
In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects product quality and yield. Particularly in microfabrication and inspection processes, accurate positioning at the nanometer level is required. Conventional stages that involve friction have faced challenges with precision degradation due to wear and backlash. The PIglide A-121 combines magnetic direct drive and air bearing technology to address these issues. 【Application Scenarios】 - Semiconductor inspection equipment - Precision measurement devices - Microfabrication 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - Reduced maintenance costs
basic information
【Features】 - Ideal for scanning applications and high-precision positioning - Clean room compatible - Moving part size: 115mm x 115mm - Maximum travel range of 350mm - 60mm low profile - Resolution of 1nm 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide precision positioning solutions that best meet our customers' needs. We offer a wide range of products, including piezo stages, as well as peripheral equipment such as granite bases, and we can also propose integrated systems.
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Model number/Brand name
A-121 PIglide AT1 Linear Stage with Air Bearings
Applications/Examples of results
- High-precision positioning of semiconductor inspection equipment - Alignment and assembly processes of optical elements - Sample movement control for X-ray CT and microscope systems - Stages equipped with surface shape measuring instruments and nano profilers - Precision transport systems in clean rooms - High-resolution moving platforms in scientific research institutions *For more details, please refer to the catalog or feel free to contact us.*
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.