Linear Air Bearing Stage PIglideA-121 High Precision Model
Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.
The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.
basic information
- Ideal for scanning applications and high-precision positioning - Cleanroom compatible - Moving part size: 115mm × 115mm - Maximum travel range of 350mm - 60mm low profile - Resolution of 1nm *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- High-precision positioning of semiconductor inspection equipment - Alignment and assembly processes of optical elements - Sample movement control for X-ray CT and microscope systems - Stages equipped with surface shape measuring instruments and nano profilers - Precision transport systems in clean rooms - High-resolution moving platforms in scientific research institutions *For more details, please refer to the catalog or feel free to contact us.*
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.