Linear Air Bearing Stage PIglideA-121 High Precision Model
Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.
The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.
basic information
- Ideal for scanning applications and high-precision positioning - Cleanroom compatible - Moving part size: 115mm × 115mm - Maximum travel range of 350mm - 60mm low profile - Resolution of 1nm *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- High-precision positioning of semiconductor inspection equipment - Alignment and assembly processes of optical elements - Sample movement control for X-ray CT and microscope systems - Stages equipped with surface shape measuring instruments and nano profilers - Precision transport systems in clean rooms - High-resolution moving platforms in scientific research institutions *For more details, please refer to the catalog or feel free to contact us.*
