300mm High-Speed XY Air Bearing Planar Scanner A-311
Zero wear with air levitation and linear motor. Maximum speed 2m/s, sensor resolution 1nm.
The PIglide IS A-311 is an air-bearing XY planar scanner that levitates the stage drive surface using air. With a flat structure thinner than stacked types, it achieves a compact device design while operating over a wide scanning range of 300 mm × 400 mm and a sensor resolution of 1 nm. The frictionless linear motor drive contributes to a high-speed response of up to 2 m/s and a load capacity of 147 N, aiding in reducing cycle times for laser processing and semiconductor wafer inspection. Its dust-free structure is suitable for clean rooms, and a rich array of controllers/APIs facilitates the integration of XY synchronization and area scanning. For more details, please download the PDF or contact us.
basic information
- Ideal for scanning applications and high-precision positioning - Cleanroom compatible - Movement range of 300mm x 300mm - Load capacity of up to 147N - Resolution of up to 1nm *For more details, please download the PDF or contact us.
Price range
Delivery Time
Model number/Brand name
A-311
Applications/Examples of results
Laser processing scanning
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[Exhibition Information] PI Japan will exhibit at "OPIE'25".
PI Japan will exhibit at the optical-related specialized exhibition "OPIE'25" to be held in April. 【Exhibition Details】 Date: April 23 (Wednesday) to 25 (Friday), 2025, 10:00 AM to 5:00 PM Location: Pacifico Yokohama Booth Number: E-32 【Exhibited Products】 Please check the related link for "Exhibited Products and Booth Visit Reservations." Admission is free, but prior registration is required. Please complete your pre-registration from the related link. - You can click on PI Japan in the "OPIE'25 Exhibitor List" to reserve a booth visit. - Pre-registration can be done from "Pre-registration for OPIE'25." We look forward to seeing you there!
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We will be exhibiting at the 23rd Photonix (Photon and Laser Technology Exhibition)!
PI Japan Co., Ltd. will be exhibiting at Photonix (Photon and Laser Technology Exhibition) held at Makuhari Messe! Booth: Hall 8 Booth Number: [51-30] Layout with Booth Number https://www.material-expo.jp/doc_location_tokyo/ We will showcase various piezo positioning products, hexapods ideal for alignment, and a range of linear motor stages and air bearing products. We will also have demo units of PGW's porous chucks and systems for laser processing machines, so please stop by. Event Dates: October 4, 2023 (Wednesday) to October 6, 2023 (Friday) 10:00 AM to 6:00 PM Only on the final day until 5:00 PM Venue: Makuhari Messe 2-1 Nakase, Mihama-ku, Chiba City, Chiba Prefecture 261-8550 Nearest Stations: - About a 5-minute walk from JR Keiyo Line "Kaihin Makuhari Station" - About a 17-minute bus ride from JR Sobu Line / Keisei Line "Makuhari Hongo Station"
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.