Air Bearing Voice Coil Linear Stage A-142PIglide
Achieves high-speed and smooth sub-micron operation with 5nm resolution at 200mm/s.
The A-142 is a compact linear stage driven by a voice coil motor, achieving speeds of up to 200 mm/s and accelerations of 10 m/s² within a travel range of 10 mm. It offers a sensor resolution of 5 nm, a position accuracy of ±0.2 µm, and a minimum incremental motion of 50 nm. With a zero-wear air bearing structure, it requires no lubrication and is suitable for cleanroom applications, making it ideal for semiconductor inspection, optical adjustment, and measurement applications.
basic information
- Speed: Maximum 200 mm/s - Acceleration: Maximum 10 m/s² - Sensor resolution: 5 nm - Slim design: 27 mm - Ultra-compact motion platform: 75 mm × 80 mm - Travel range: 10 mm - Load capacity: 3 kg *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- Fine positioning and scan control in semiconductor inspection equipment - High-precision alignment of optical elements and fibers - High-speed alignment of micro components in the field of photonics - Non-contact nano positioning in clean rooms - Smooth linear motion control in precision measurement equipment - Modular configuration of vertical Z-axis stages and XY stages *For more details, please refer to the catalog or feel free to contact us.
