Sub-nanometer resolution capacitive displacement sensor D-510 for precision machinery
Non-contact displacement measurement with sub-nanometer resolution. Contributing to position control and improved machining accuracy of precision processing equipment.
In the field of precision machining, high-precision displacement measurement at the nanometer level is required to improve machining accuracy and equipment performance. Even slight vibrations or positional shifts can significantly impact machining accuracy and product quality. The D-510 is a high-resolution sensor that employs non-contact displacement measurement using capacitive methods. With sub-nanometer resolution, it can perform high-precision position feedback and vibration measurement in precision machining equipment, contributing to the stabilization of the machining process and improvement of accuracy. [Application Scenarios] - Position feedback for precision machining equipment - Position control in micro-machining processes - Precision positioning systems - Semiconductor manufacturing equipment - Precision vibration measurement [Benefits of Implementation] - High-precision displacement measurement at the nanometer level - Reduced impact on the object being measured due to non-contact measurement - Improved machining accuracy - High-precision monitoring of equipment vibrations
basic information
**Features** - Non-contact measurement of distance/movement/vibration - Absolute position detection - Sub-nanometer resolution - Measurement range up to 500μm - Easy integration - High-frequency band compatibility **Our Strengths** Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.
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Model number/Brand name
PISeca Single Electrode Capacitive Sensor D-510
Applications/Examples of results
- Semiconductor manufacturing/testing and measurement - Precision machining *For more details, please refer to the catalog or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.