2-Electrode Capacitive Sensor D-050/D-100 High-Resolution Nano Measurement

Maximum measurement range of 150µm, compatible with high-precision nano displacement control.

The D-050/D-100 is a two-electrode capacitive sensor provided by PI that achieves a measurement range of up to 150µm and a resolution of 0.01nm. It is ideal for nanometer-scale measurements due to its higher resolution than interferometers and its non-contact method. It supports parallel measurements and allows for real-time correction in multi-axis control. Linearity is less than 0.01% (when using a digital controller), and the bandwidth is up to 10kHz. It is suitable for clean environments, semiconductor manufacturing, and integration into measuring instruments.

basic information

- Ideal for applications requiring high precision - Measurement range: ~ 0.01nm - Resolution: 0.01nm - When using a digital controller - Linearization: ~ 0.01% - Bandwidth: ~ 10kHz *For more details, please refer to the catalog or feel free to contact us.