0.1 nm resolution nanopositioning stage P-752
High-speed piezo stage with a maximum stroke of 35 µm, a resolution of 0.1 nm, and a load capacity of 10 N.
The P-752 is an excellent single-axis nanopositioning stage with a flexure guide structure that incorporates a two-electrode capacitive sensor, achieving zero friction and outstanding straightness (pitch and yaw error ±1μrad), with an open-loop resolution of 0.1nm. Additionally, the built-in capacitive sensor measures the actual moving parts non-contactly at a sub-nanometer level, providing higher linearity and hysteresis compensation, ensuring long-term stability. *For more details, please download the PDF or contact us.*
basic information
- Resolution of 0.1 nm, high-speed response - Stroke of up to 35 μm - High linearity with capacitive sensors - Achieves high straightness of movement with no friction through flexure guides - Incredible long lifespan with PICMA(TM) piezo actuators *For more details, please download the PDF or contact us.
Price information
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Delivery Time
Applications/Examples of results
Application examples - Disk drive inspection - Various measurements - Nano positioning - Scanning microscopy - Photonics / Optical integrated circuits - Interferometer - Biotechnology - Micromanipulation