0.1 nm resolution nanopositioner P-620.1/629.1
Type with a stroke of 50 to 1800 µm, high-resolution operation with capacitive sensors.
The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*
basic information
- Stroke 50 to 1800 μm - High precision, low cost - 0.1 nm resolution - Built-in capacitive sensor - 0.02% positioning accuracy - Frictionless high-precision flexure guide system - Amazing long lifespan with PICMA(TM) piezo actuators - X, XY, Z, and XYZ versions - Vacuum-compatible version also available *For more details, please download the PDF or contact us.*
Price information
Please feel free to contact us.
Delivery Time
Model number/Brand name
PIHera(R) Piezo Linear Stage P-620.1 to P-629.1
Applications/Examples of results
Application examples - Interferometer - Inspection using a microscope - Nano positioning - Biotechnology - Quality assurance testing - Semiconductor technology
