50 mm aperture multi-axis piezo scanner P-517/527
Integrated structure with zero-friction flexure guide - capable of XY axis, XYZ axis, and XYθz axis motion.
The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.
basic information
- 2-axis and 3-axis versions (XY and XYθZ) - Stroke up to 200μm - Sub-nanometer resolution - Frictionless high-precision flexure guide system - High linearity with capacitive sensors - Improved responsiveness through parallel control/measurement structure / precise multi-axis control - Center opening 66 x 66mm - Amazing long lifespan with PICMA(TM) piezo actuators *For more details, please download the PDF or contact us.
Price information
Please feel free to contact us.
Delivery Time
Applications/Examples of results
Application examples - Metrology - Interferometer - Optics - Lithography - Nano positioning - Scanning microscope - Mass storage device testing - Laser technology - Micro machining
