ピーアイ・ジャパン Official site

P-611.XZ, P-611.2 XZ, and XZ Nanopositioner

A compact 2-axis piezo system for nano positioning. A flexure guide nano positioning system with a footprint of 44x44mm.

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of 44 x 44 mm ○ Stroke up to 120 x 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanical/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, Z, and XYZ versions ● For more details, please contact us or refer to the catalog.

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Applications/Examples of results

Application examples - Fiber optic positioning - Semiconductor testing - Micro machining - Micro manipulation - MEMS manufacturing/testing - Photonics/integrated optics

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