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N-111 NEXLINE OEM Linear Motor/Actuator

PiezoWalk(R) drive for long-distance nanopositioning. Compact with a stroke of up to 5mm, high resolution, and a generated force of up to 40N.

The N-111 NEXLINE(R) OEM drive is a compact nano-positioning actuator with a stroke of up to 5mm, high resolution, and a generated force of up to 40N. 【Features】 ○ Stroke: 5mm ○ Resolution: 0.025nm (open loop) and 5nm (closed loop) ○ Push-pull force up to 40N and holding force of 60N ○ Automatic locking when stationary, no heat generation ○ Non-magnetic and vacuum-compatible operating principle ● For more details, please contact us or refer to the catalog.

Related Link - https://www.pi-japan.jp/ja/products/linear-actuato…

basic information

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Model number/Brand name

N-111 NEXLINE(R) OEM Linear Motor/Actuator

Applications/Examples of results

Application examples - Semiconductor manufacturing - Semiconductor testing - Wafer inspection - Nano lithography - Nano imprinting - Nano measurement - Active vibration damping - Operation in strong magnetic fields

[Semiconductor Manufacturing / Wafer Inspection] PiezoWalk(R) Motor / Actuator N-111.2

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